There has been an increasing need for substitute energy development due to the dry up of the fossil fuel and environmental problems. Among the substitute energy under consideration, producing hydrogen from water without the accompanying release of carbon has become a promising technology. Also, Iodine-Sulfur (IS) thermochemical water decomposition is one of the promising processes that can produce hydrogen efficiently using the high temperature gas-cooled reactor (HTGR) as an energy source capable of supplying heat at over 1000. In this study, to effect an initiating events identification of the IS process, Master Logic Diagram (MLD) was used and 9 initiating events that cause a leakage of the chemical material were identified.