On this study, we developed the electrostatic eliminator for charged particles in manufacturing process. The characteristics of the electrostatic eliminator were investigated, which is two kinds. The first one is Electrical Corona Discharged Type Ionizer. The second one is Photo Ionizer in using soft X-ray. From the experiment, we have obtained the following results. In case of Electrical Corona Discharged Ionizer, neutralization efficiency of charged particles were approximately saturated to 98% over 6.0kV, but as it is non-explosion proof, can not be used in flammable particle treatment process. While in case of photo Ionizer in using soft X-Ray, neutralization efficiency of charged particles were approximately 95%, and more its structure is explosion proof, could be used in flammable particle treatment process.