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Negative PR의 기밀 특성
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  • Negative PR의 기밀 특성
  • Hermetic Characteristics of Negative PR
저자명
최의정,선용빈,Choi. Eui-Jung,Sun. Yong-Bin
간행물명
반도체및디스플레이장비학회지
권/호정보
2006년|5권 2호|pp.33-36 (4 pages)
발행정보
한국반도체및디스플레이장비학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Many issues arose to use the Pb-free solder as adhesive materials in MEMS ICs and packaging. Then this study for easy and simple sealing method using adhesive materials was carried out to maintain hermetic characteristic in MEMS Package. In this study, Hermetic characteristic using negative PR (XP SU-8 3050 NO-2) as adhesive at the interface of Si test coupon/glass substrate and Si test coupon/LTCC substrate was examined. For experiment, the dispenser pressure was 4 MPa and the $200;{mu}m{Phi}$ syringe nozzle was used. 3.0 mm/sec as speed of dispensing and 0.13 mm as the gap between Si test coupon and nozzle was selected to machine condition. 1 min at $65^{circ}C$ and 15 min at $95^{circ}C$ as Soft bake, $200;mj/cm^2$ expose in 365 nm wavelength as UV expose, 1 min at $65^{circ}C$ and 6 min at $95^{circ}C$ as Post expose bake, 60 min at $150^{circ}C$ as hard bake were selected to activation condition of negative PR. Hermetic sealing was achieved at the Si test coupon/ glass substrate and Si test coupon/LTCC substrate. The leak rate of Si test coupon/glass substrate was $5.9{ imes}10^{-8}mbar-l/sec$, and there was no effect by adhesive method. The leak rate of Si test coupon/LTCC substrate was $4.9{ imes}10^{-8}mbar-l/sec$, and there was no effect by dispensing cycle. Better leak rate value could be achieved to use modified substrate which prevent PR flow, to increase UV expose energy and to use system that controls gap automatically with vision.