- C-축 배향된 ZnO 박막을 이용하여 제작한 압전형 마이크로 스피커의 특성 평가
- ㆍ 저자명
- 이승환,서경원,유금표,권순용,Yi. Seung-Hwan,Seo. Kyong-Won,Ryu. Kum-Pyo,Kweon. Soon-Young
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2006년|19권 6호|pp.531-537 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A micromachined piezoelectric microspeaker was fabricated with a highly c-axis oriented ZnO thin film on a silicon-nitride film having compressive residual stress. When it was measured 3 mm away from the microspeaker in open field, the largest sound pressure level produced by the fabricated microspeaker was about 91 dB at around 2.9 kHz for the applied voltage of $6;V_{peak-to-peak}$. The key technologies to these successful results were as follows: (1) the usage of a wrinkled diaphragm caused by the high compressive residual stress of silicon-nitride thin film, (2) the usage of the highly c-axis oriented ZnO thin film.