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폴리비닐 계열 유기절연막 형성과 특성평가
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  • 폴리비닐 계열 유기절연막 형성과 특성평가
  • Formation and Characterization of Polyvinyl Series Organic Insulating Layers
저자명
장지근,정진철,신세진,김희원,강의정,안종명,서동균,임용규,김민영,Jang. Ji-Geun,Jeong. Jin-Cheol,Shin. Se-Jin,Kim. Hee-Won,Kang. Eui-Jung,Ahn. Jong-Myong,Seo.
간행물명
반도체및디스플레이장비학회지
권/호정보
2006년|5권 1호|pp.39-43 (5 pages)
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한국반도체및디스플레이장비학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The polyvinyl series organic films as gate insulators of thin film transistor(TFT) have been processed and characterized on the polyether sulphone (PES) substrates . The poly-4-vinyl phenol(PVP) and polyvinyl toluene (PVT) were used as solutes and propylene glycol monomethyl ether acetate(PGMEA) as a solvent in the formation of organic insulators. The cross-linking of organic insulators was also attempted by adding the thermosetting material, poly (melamine-co-formaldehyde) as a hardener in the compound. The electrical characteristics measured in the metal-insulator-metal (MIM) structures showed that insulating properties of PVP layers were generally superior to those of PVT layers. Among the layers of PVP series; copolymer PVP(10 wt%), 5wt% cross-linked PVP(10 wt%), copolymer PVP(20 wt%), 5 wt% cross-linked PVP(20 wt%) and 10 wt% cross-linked PVP(20 wt%), the 10 wt% cross-linked PVP(20 wt%) layer showed the lowest leakage current of 1.2 pA at ${pm}10V$. The ms value of surface roughness and the capcitance per unit area are 2.41 and $1.76nF/cm^2$ in the case of 10 wt% cross-linked PVP(20 wt%) layer, respectively.