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Rapid Manufacturing of 3D Micro-products using UV Laser Ablation and Phase-change Filling
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  • Rapid Manufacturing of 3D Micro-products using UV Laser Ablation and Phase-change Filling
  • Rapid Manufacturing of 3D Micro-products using UV Laser Ablation and Phase-change Filling
저자명
Shin. Bo-Sung,Kim. Jae-Gu,Chang. Won-Suk,Whang. Kyung-Hyun
간행물명
International journal of precision engineering and manufacturing
권/호정보
2006년|7권 3호|pp.56-59 (4 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

UV laser micromachining is generally used to create microstructures for micro-products through a sequence of lithography-based photo-patterning steps. However, the micromachining process is not suitable for rapid realization of complex 3D micro-products because it depends on worker experience. In addition, the cost and time required to make many masks are excessive. In this paper, a more effective and rapid micro-manufacturing process, which was developed based on laser micromachining, is proposed for fabricating micro-products directly using UV laser ablation and phase-change filling. The filling process is useful for holding the micro-products during the ablation step. The proposed rapid micro-manufacturing process was demonstrated experimentally by fabricating 3D micro-products from functional UV-sensitive polymers using 3D CAD data.