- Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles
- Effects of Polymer Adsorption on Stabilities and CMP Performance of Ceria Abrasive Particles
- ㆍ 저자명
- Shimono. Norifumi,Kawaguchi. Masami,Koyama. Naoyuki
- ㆍ 간행물명
- Transactions on electrical and electronic materials
- ㆍ 권/호정보
- 2006년|7권 3호|pp.112-117 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
