- 선형 유도결합 플라즈마 시스템에서 자장에 의한 플라즈마의 Confinement 효과에 관한 연구
- ㆍ 저자명
- 임종혁,김경남,염근영,Lim. Jong-Hyeuk,Kim. Kyong-Nam,Yeom. Geun-Young
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2006년|39권 3호|pp.142-146 (5 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880;mm{ imes}660;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{ imes}10^{11};cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880;mm{ imes}660;mm$ as rf power increased.