- Al합금에서 질소이온주입에 의한 질화물 형성과 기계적 특성 향상
- ㆍ 저자명
- 정재필,이재상,김계령,최병호,Jeong. Jae-Pil,Lee. Jae-Sang,Kim. Kye-Ryung,Choi. Byung-Ho
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2006년|39권 5호|pp.235-239 (5 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The aluminum nitride(AlN) layer on Al7075 substrate has been formed through nitrogen ion implantation process. The implantation process was performed under the conditions : 100 keV energy, total ion dose up to $2{ imes}10^{18};ions/cm^2$. XRD analysis showed that aluminum nitride layers were formed by nitrogen implantation. The formation of Aluminum nitride enhanced surface hardness up to 265HK(0.02 N) from 150HK(0.02 N) for the unimplanted specimen. Micro-Knoop hardness test showed that wear resistance was improved about 2 times for nitrogen implanted specimens above $5;{ imes};10^{17};ions/cm^2$. The friction coefficient was measured by Ball-on-disc type wear tester and was decreased to 1/3 with increasing total nitrogen ion dose up to $1;{ imes};10^{18}ions/cm^2$. The enhancement of mechanical properties was observed to be closely associated with AlN formation. AES analysis showed that the maximum concentration of nitrogen increased as ion dose increased until $5;{ imes};10^{17};ions/cm^2$.