- 다중벽 탄소 나노튜브를 이용한 유동 압력 검출
- ㆍ 저자명
- 송진원,이종홍,이응숙,한창수,Song. Jin-Won,Lee. Jong-Hong,Lee. Eung-Sug,Han. Chang-Soo
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2007년|16권 5호|pp.377-383 (7 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). The device was assembled by an application of electric field in solution. The MWNT was clamped on end of metal trench electrodes in solution and deposited with additional platinum (Pt) on edge of electrode for firmly suspending the MWNT by focused ion beam (FIB). The MWNTs range of diameter and length were 100 to 150 nm and 1.5 to $2{mu}m$, respectively. Electrical characteristics of fabricated devices were measured by I-V curve and impedance analysis. The mechanical deformation was observed by resistivity in high air pressure. Resonant frequency around 6.8 MHz was detected and resistivity was linearly varied according to the magnitude of air pressure. This device could have potential applications in nanoelectronics and various sensors.