- 기판접합기술을 이용한 두꺼운 백플레이트와 수직음향구멍을 갖는 정전용량형 마이크로폰의 설계와 제작
- ㆍ 저자명
- 권휴상,이광철,Kwon. Hyu-Sang,Lee. Kwang-Cheol
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2007년|16권 1호|pp.62-67 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${ imes}$2.5 mm, $0.5{mu}m$ thick low stress silicon nitride membrane, 2 mm${ imes}$2 mm Au/Ni/Cr membrane electrode, and $3{mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${ imes}$2 mm, $150{mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${ imes}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.