A simple and facile sonochemical route was described for the fabrication of diameter-controlled ZnO nanorod arrays on Si wafers. The diameter of ZnO nanorods was controlled by the concentration of zinc cations and hydroxyl anions in aqueous precursor solution. At high concentration of the precursor solution, thick ZnO nanorod arrays were formed. On the contrary, thin ZnO nanorod arrays were formed at low concentration of the precursor solution. The average diameter of ZnO nanorods varies from 40 to 200 nm. ZnO nanorod arrays with sharp tip were also fabricated by the step-by-step decrease in precursor solution concentration. The crystal structure and optical characteristics of ZnO nanorods were investigated by transmission electron microscopy, X-ray diffraction, and photoluminescence spectroscopy. Growth mechanism of ZnO nanorod arrays was also proposed.