When micro holes are machined by EDM, machining characteristics of machined holes are changed according to the machining conditions. Typical machining conditions are the kind of dielectric fluids, capacitance and ultrasonic vibrations. They influence electrode wear, machining time, radial clearance and taper angle. In this paper, machined holes whose depths are 300, 500, $1000;{mu}m$ are observed for each machining conditions. Using deionized water as a dielectric fluid makes electrode wear small, machining time short, radial clearance large and taper angle small. High capacitance makes electrode wear high. Ultrasonic vibrations make electrode wear large, machining time short, radial clearance small and taper angle small. From the results of experiments, the optimal machining conditions were obtained to machine highly qualified micro holes.