- 3극 전계방출 전자총의 정전기 렌즈에 의한 전자빔 거동
- ㆍ 저자명
- 김충수,김동환,박만진,장동영,한동철,Kim. Chung-Soo,Kim. Dong-Hwan,Park. Man-Jin,Jang. Dong-Young,Han. Dong-Chul
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2007년|16권 6호|pp.163-167 (5 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A field emission electron gun including 3 electrodes including one cathode and two anodes is very important for high resolution electron microscope. To have functions to control the initially-emitted electron beam, two anodes act as an electrostatic lens according to equipotential lines by adjusting the spot size, intensity, and working distance. To verify the action of the electron beam by the electrostatic lens by changing several parameters such as electrode shape, displacement and applied voltage to the electrodes, the two lenses were design and simulated and then their performances were analyzed with angular beam intensity(distribution), electrical optic axis variation and their stability.