- 어닐링처리시킨 SnO2 가스센서의 박막성장특성
- ㆍ 저자명
- 강계명,최종운,Kang. Kae-Myung,Choi. Jong-Un
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2007년|40권 6호|pp.258-261 (4 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Relationships between the electrical resistivity and the growth characteristic of $SnO_2$ thin films were investigated. $SnO_2$ thin films with thickness from 64 nm to 91 nm were made by controlling the RF deposition energy from 80 to 150 W. These $SnO_2$ thin films were annealed at $200^{circ}C{sim}700^{circ}C$ temperature range of $100^{circ}C$ interval in the $O_2$ gas condition. After annealing treatments, the microstructures of the $SnO_2$ thin films were changed mixed structure(amorphous & crystalline) to lamina columnar crystalline structure. Both the film thickness and the grain size were increased with increasing the local crystallization of $SnO_2$ microstructure of thin films by annealing treatment. Their electrical resistivity increased up to the annealing temperature of $400^{circ}C$, and then slowly decreased.