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An analysis of new IGBT(Insulator Gate Bipolar Transistor) structure having a additional recessedwith E-field shielding layer
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  • An analysis of new IGBT(Insulator Gate Bipolar Transistor) structure having a additional recessedwith E-field shielding layer
  • An analysis of new IGBT(Insulator Gate Bipolar Transistor) structure having a additional recessedwith E-field shielding layer
저자명
유승우,이한신,강이구,성만영,Yu. Seung-Woo,Lee. Han-Shin,Kang. Ey-Goo,Sung. Man-Young
간행물명
전기전자학회논문지
권/호정보
2007년|11권 4호|pp.247-251 (5 pages)
발행정보
한국전기전자학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The recessed gate IGBT has a lower on-state voltage drop compared with the DMOS IGBT, because there is no JFET resistance. But because of the electric field concentration in the corner of the gate edge, the breakdown voltage decreases. This paper is about the new structure to effectively improve the Vce(sat) voltage without breakdown voltage drop in 1700V NPT type recessed gate IGBT with p floating shielding layer. For the fabrication of the recessed gate IGBT with p floating shielding layer, it is necessary to perform the only one implant step for the shielding layer. Analysis on the Breakdown voltage shows the improved values compared to the conventional recessed gate IGBT structures. The result shows the improvement on Breakdown voltage without worsening other characteristics of the device. The electrical characteristics were studied by MEDICI simulation results.