This paper presents an investigation on the characteristics of damaged layer in micro-machining by using the ultrahigh-speed air spindle. The damaged layer in metal cutting is derived from plastic deformation and transformation of metal structure. In this study, micro-cutting force, surface roughness, and plastic deformation layer according to the variation of machining conditions were investigated by experiments. The damaged layer was measured using optical microscope for the samples prepared by metallographic techniques. Its scale was dependent on cutting process parameters, especially feed per tooth. According to experimental results, it was verified that the thickness of damaged layer was increased with increasing of feed per tooth and cutting depth, also thickness of damaged layer was reduced in down-milling compared to upmilling during micro-endmilling operation.