- 고탄성 고분해능을 갖는 응착력 측정장치의 개발
- ㆍ 저자명
- 김규성,윤준호,Kim. Gyu-Sung,Yoon. Jun-Ho
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2007년|24권 3호|pp.140-146 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
To understand adhesive phenomena, we need to get force curve between two surfaces. And it is said that high stiffness force analysis system is needed to get precise force curve and more information of the surfaces. Usually the stiffness of the force measurement system is under the order of 10N/m. The stiffer force measurement system, however, results in more information on the surface, because higher stiffness lead to the wider range of force curves, secondly because the force curve obtained through the stiffer one describes more precise relationship between relative tip-sample separation and interaction force. In this paper, considering for stiffness and resolution, the cantilever was designed and we made adhesion force measurement apparatus with high stiffness and high resolution, so we measured adhesive force between Ag-ball and wafer.