High purity Si powder was prepared in the system of $SiO_2-Mg$ combustion reaction. Various conditions of combustion reaction and leaching were investigated. As the particle size of Mg decreased and the compaction pressure increased the quantity of the unreacted power was decreased. In the acid leaching of MgO, increasing particle size, reaction temperature, rotating speed and reaction time made leaching effect low. Final Si powder produced by combustion and leaching reaction, has a high purity of 99.9% with irregular shape.