- 폴리머 기판위에 형성된 나노구조제어 알루미나의 캐패시터 특성
- ㆍ 저자명
- 정승원,민형섭,한정환,이전국,Jung. Seung-Won,Min. Hyung-Sub,Han. Jeong-Whan,Lee. Jeon-Kook
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2007년|17권 2호|pp.81-85 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Embedded capacitor technology can improve electrical perfomance and reduce assembly cost compared with traditional discrete capacitor technology. To improve the capacitance density of the $Al_2O_3$ based embedded capacitor on Cu cladded fiber reinforced plastics (FR-4), the specific surface area of the $Al_2O_3$ thin films was enlarged and their surface morphologies were controlled by anodization process parameters. From I-V characteristics, it was found that breakdown voltage and leakage current were 23 V and $1{ imes}10^{-6}A/cm^2$ at 3.3 V, respectively. We have also measured C-V characteristics of $Pt/Al_2O_3/Al/Ti$ structure on CU/FR4. The capacitance density was $300nF/cm^2$ and the dielectric loss was 0.04. This nano-porous $Al_2O_3$ is a good material candidate for the embedded capacitor application for electronic products.