- The Properties of HfO2 Thin Films by DC/RF Magnetron Sputtering and Thermal Evaporation Method
- The Properties of HfO2 Thin Films by DC/RF Magnetron Sputtering and Thermal Evaporation Method
- ㆍ 저자명
- Jeong. Woon-Jo,Ahn. Ho-Geun,Kim. Young-Jun,Yang. Hyeon-Hun,Park. Gye-Choon
- ㆍ 간행물명
- Transactions on electrical and electronic materials
- ㆍ 권/호정보
- 2007년|8권 2호|pp.89-92 (4 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
