The total Fluorine content in the precursor solution for MOD processing of YBCO coated conductors can be significantly reduced by synthesizing precursor solution with F-free Y & Cu precursor and Barium trifluoroacetate(TFA). It was shown that crack-free and uniform precursor films were formed after calcinations in humidified oxygen atmosphere. Less than 2 hours are required to finish the calcinations process and XRD measurement shows that $BaF_2,;CuO,;Y_2O_3$ are major constituent of calcined precursor films. Film thickness after calcinations was improved to be 2.8um by applying slot-die coating method. In particular, addition of Samarium shows critical current of $I_c=273A/cm-w(J_c=3.8MA/cm^2)$. It is shown that uniform and fast processing route to YBCO coated conductor with high Ic can be provided by employing F-free Y & Cu precursor solution in MOD process.