[ $Moire'{e}$ ] interferometry is a useful technique to assess the reliability of electronic package because $Moire'{e}$ interferometry can measure the whole-field and real-time deformations. The shear strain of a small crack site is important to the reliability assessment of electronic package. The optical limitation of $Moire'{e}$ interferometry makes ambiguous the shear strain of a small area. An atomic force microscope (AFM) is used to measure the profile of a micro site. High resolution of AFM can apply to the $Moire'{e}$ technique. AFM $Moire'{e}$ technique is useful to measure the shear strain of a small area. In this research, the method to accurately measure the deformation of a small area by using AFM $Moire'{e}$ is proposed. A phase-shifting method is applied to improve the resolution of AFM $Moire'{e}$.