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클린룸 제조공정에서 수율개선을 위한 입자오염제어 방법
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  • 클린룸 제조공정에서 수율개선을 위한 입자오염제어 방법
저자명
노광철,이현철,김대영,오명도,Noh. Kwang-Chul,Lee. Hyeon-Cheol,Kim. Dae-Young,Oh. Myung-Do
간행물명
大韓機械學會論文集. Transactions of the Korean society of mechanical engineers. B. B
권/호정보
2007년|31권 6호|pp.522-530 (9 pages)
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was proposed, which are composed of data collection, data analysis, improvement action, verification, and implement control. The partition check method and the composition analysis for data collection and data analysis were respectively used in the main board and the cellular phone module production lines. And these methods were evaluated by the variation of yield loss between before and after improvement action. In case that the partition check method was applied, the critical process step was selected and yield loss reduction through improvement actions was observed. While in case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the partition check and the composition analysis are effective solutions for particle contamination control in the cleanroom production lines.