- 아크 이온플레이팅법에 의한 저온 CrN 합성
- ㆍ 저자명
- 조용기,김상권,이원범,김성완,Cho. Yong K.,Kim. Sang K.,Lee. Won B.,Kim. Sung W.
- ㆍ 간행물명
- 열처리공학회지
- ㆍ 권/호정보
- 2007년|20권 2호|pp.78-83 (6 pages)
- ㆍ 발행정보
- 한국열처리공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
CrN coatings were deposited by cathodic arc ion plating method on the SKD11 steel substrates. Atmosphere temperature of $350^{circ}C$, arc current of 90 A, nitrogen partial pressure of 1.0-5.3 Pa, and negative bias voltage of 30-135 V were selected. The characteristics of microstructure were investigated with XRD. Hardness, adhesion and friction coefficient measured by microhardness tester, scratch tester, and ball on disk tribometer. Microstructures depended on nitrogen partial pressure and bias voltage. The preferred orientation of the films was changed from (200) to (111) with decreasing pressure and increasing bias voltage. Adhesion properties related with microstructure, but microstructure changes slightly influenced on hardness and friction properties. The critical load.($Lc_1$) and hardness of CrN films deposited at 5.3 Pa, -30 V condition were 55 N(HF1), $2157{pm}47;Hk_{0.025}$. The friction coefficient were about 0.5 under dry condition.