As electric and mechanical devices have been miniaturized and highly integrated, heat generation per unit volume has been greatly increased. Therefore, effective cooling methods for micro and miniature systems have emerged as critical issues nowadays and a lot of studies have been carried out to find an optimum cooling strategy. This paper reviews recent researches on the cooling technologies which are mainly based on micro-fabrication processes. Design, development, experiments and numerical analysis of various cooling devices are discussed and their characteristics, problems and advantages are compared.