- 패턴된 GaN 에피층 위에 ZnO 막대의 수직성장
- ㆍ 저자명
- 최승규,이성학,장재민,김정아,정우광,Choi. Seung-Kyu,Yi. Sung-Hak,Jang. Jae-Min,Kim. Jung-A,Jung. Woo-Gwang
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2007년|17권 5호|pp.273-277 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Vertically aligned Zinc Oxide rod arrays were grown by the self-assembly hydrothermal process on the GaN epitaxial layer which has a same lattice structure with ZnO. Zinc nitrate and DETA solutions are used in the hydrothermal process. The $(HfO_2)$ thin film was deposited on GaN and the patterning was made by the photolithography technique. The selective growth of ZnO rod was achieved with the patterned GaN substrate. The fabricated ZnO rods are single crystal, and have grown along hexagonal c-axis direction of (002) which is the same growth orientation of GaN epitaxial layer. The density and the size of ZnO rod can be controlled by the pattern. The optical property of ordered array of vertical ZnO rods will be discussed in the present work.