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광자결정 제작을 위한 홀로그라피 공정 연구
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저자명
여종빈,윤상돈,이현용,Yeo. Jong-Bin,Yun. Sang-Don,Lee. Hyun-Yong
간행물명
전기전자재료학회논문지
권/호정보
2007년|20권 8호|pp.726-730 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Two dimensional photonic crystals (2D PCs) have been fabricated by a double exposure holographic method using a He-Cd laser with a wavelength of 442nm. The arrays of the 2D PCs exhibit variable lattice structures from square to triangle according to a change of rotating angle $({gamma})$ for double exposure beams. In addition, the period and filling factor of PCs as well as the forms (dot or antidot) could be controlled by experimental conditions. $A l.18-{mu}m-thick$ resist was spin-coated on Si substrate and the 1st holographic exposure was carried out at incident angle $({ heta})$ of $11^{circ}$. Then the sample was rotated to ${gamma}=45^{circ}{sim}90^{circ}$ and the 2nd holographic process was performed at ${ heta}=11^{circ}$. The variation of diffraction efficiency during the exposure process was observed using a He-Ne laser in real time. The images of 2D PCs prepared were analyzed by SEM and AFM. We believe that the double holographic method is a tool suitable to realize the 2D PCs with a periodic array of large area.