- 광자결정 제작을 위한 홀로그라피 공정 연구
- ㆍ 저자명
- 여종빈,윤상돈,이현용,Yeo. Jong-Bin,Yun. Sang-Don,Lee. Hyun-Yong
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2007년|20권 8호|pp.726-730 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Two dimensional photonic crystals (2D PCs) have been fabricated by a double exposure holographic method using a He-Cd laser with a wavelength of 442nm. The arrays of the 2D PCs exhibit variable lattice structures from square to triangle according to a change of rotating angle $({gamma})$ for double exposure beams. In addition, the period and filling factor of PCs as well as the forms (dot or antidot) could be controlled by experimental conditions. $A l.18-{mu}m-thick$ resist was spin-coated on Si substrate and the 1st holographic exposure was carried out at incident angle $({ heta})$ of $11^{circ}$. Then the sample was rotated to ${gamma}=45^{circ}{sim}90^{circ}$ and the 2nd holographic process was performed at ${ heta}=11^{circ}$. The variation of diffraction efficiency during the exposure process was observed using a He-Ne laser in real time. The images of 2D PCs prepared were analyzed by SEM and AFM. We believe that the double holographic method is a tool suitable to realize the 2D PCs with a periodic array of large area.