In this paper, authors deal with an application of power quality monitoring using the Sampled Value which is described in the IEC61850 International Standard for substation communication. Firstly, while Merging Unit is designed as a process level device transmitting sensor data, the practical problems such as time delay compensation and optical fiber communication are issued. Secondly, the Sampled Value message which is proper to a power quality monitoring system is presented. Because the power quality monitoring system requests non time critical service comparing to protection and control applications, the Sampled Value service message structure is introduced to improve efficiency. At last, the power quality monitoring server having various power quality analysis functions is suggested to verify the performance of Merging Unit. With the diverse experiments, it is proved that the process bus distributed solution is flexible and economic for the power quality monitoring.