- LCD 검사 장비용 패드형 에어베어링 설계
- ㆍ 저자명
- 오현성,이상민,박정우,김용우,이득우,Oh. Hyun-Seong,Lee. Sang-Min,Park. Jeong-Woo,Kim. Yong-Woo,Lee. Deug-Woo
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2007년|24권 9호|pp.103-109 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
LCD (Liquid Crystal Display) is widely used electronic product. It needs too many processes such as PECVD (Plasma Enhanced Vapor Deposition), Sputtering, Photo-lithography, Dry etch. Each process is important but inspection process is more important because most companies emphasis on the six sigma. Recently, LCD inspection system is composed with inlet, inspector, outlet air pads. LCD is inspected on air pad which is shooting air from air hole. This paper studies on pad design of air bearing for LCD inspection to minimize LCD fluctuation. This design is able to reduce fluctuation and then satisfies CCD inspectional range. Also inspection pad needs to adequate stable area.