- 주사 전자현미경의 이미지 해상도 향상을 위한 방안 및 실험적 검증
- ㆍ 저자명
- 김동환,김영대,박만진,장동영,박근,Kim. Dong-Hwan,Kim. Young-Dae,Park. Man-Jin,Jang. Dong-Young,Park. Keun
- ㆍ 간행물명
- 한국공작기계학회논문집
- ㆍ 권/호정보
- 2007년|16권 5호|pp.122-128 (7 pages)
- ㆍ 발행정보
- 한국공작기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.