A micro press forming and in-process assembly technology were developed and applied to fabrication of metal parts and units. Technologies based on high-energy beams, such as ion and short pulse laser were developed for fabrication of features of dies in micro scale and finishing surface in nano scale. In addition, DLC coating on surface of the die was developed in order to improve wear-resistance and reduce friction. A micro gear with diameter of 0.2 mm was produced using sheet metals. Furthermore, a unit part with three components was fabricated in a precise progressive die using the micro press system. The results show that the micro metal forming could be a new technology for fabrication of micro devices, such as MEMS, bio-chips in low cost and with large quantities.