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Growth of Aluminum Doped Zinc Oxide Films on Polymer Substrates for Flexible Display Applications
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  • Growth of Aluminum Doped Zinc Oxide Films on Polymer Substrates for Flexible Display Applications
  • Growth of Aluminum Doped Zinc Oxide Films on Polymer Substrates for Flexible Display Applications
저자명
Lee. Jae-Hyeong,Lee. Jong-In
간행물명
International journal of maritime information and communication sciences
권/호정보
2007년|5권 3호|pp.219-222 (4 pages)
발행정보
한국해양정보통신학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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Highly conductive and transparent aluminum doped ZnO thin films (AZO) films have been prepared by r.f. magnetron sputtering processes on poly carbonate (PC) and onto glass as reference. In addition, the electrical, optical properties of the films prepared at various sputtering powers were investigated. The XRD measurements revealed that all of the obtained films were polycrystalline with the hexagonal structure and had a preferred orientation with the c-axis perpendicular to the substrate. The ZnO:Al films were increasingly dark gray colored as the sputter power increased, resulting in the loss of transmittance. High quality films with the resistivity as low as $9.7{ imes}10^{-4};{Omega}-cm$ and transmittance over 90% have been obtained by suitably controlling the r.f. power.