적층구조 촉매층(Al/Fe/Al)을 이용하여 열 화학기상증착(thermal chemical vapor deposition ; TCVD)법을 통해 탄소 나노튜브를(carbon nanotubes ; CNTs)를 합성하였다. Raman spectroscopy, SEM 및 HR-TEM 분석결과, G/D는 22.7이며, 직경이 $1.14;{sim};1.32;nm$인 금속성의 단일벽 탄소 나노튜브(single-walled CNTs ; SWCNTs)의 다발(bundle)들이 기판 전체에 network 구조로 형성되어 있는 것을 확인할 수 있었다. 이는 최상층의 Al이 촉매인 Fe의 응집현상(agglomeration)을 막아주는 역할을 하여 작고 균일한 핵 생성 사이트(nucleation site)를 통해 좁은 직경분포를 가진 단일벽 탄소 나노튜브가 합성되었음을 알 수 있다.
In this study, we report the synthesis of the single-walled carbon nanotubes(SWCNTs) using laminated catalyst(Al/Fe/Al) layer deposited by sputter on Si(001). SWCNTs are grown by thermal chemical vapor deposition (TCVD) method. As the results of scanning electron microscopy(SEM), high resolution transmission electron microscopy(HR-TEM) and Raman spectroscopy, we confirmed the SWCNTs bundles with narrow diameter distribution of $1.14{sim}1.32;nm$ and average G&D ratio of 22.76. Compare to the sample having Fe/Al catalyst layer, it can be proposed that the top-aluminum incorporated with iron catalyst plays an important role in growing process of CNTs as a agglomeration barrier of the Fe catalyst. Thus, we suggest that a proper quantity of aluminium metal incorporated in Fe catalyst induce small and uniform iron catalysts causing SWCNTs with narrow diameter distribution.
