- 다층막을 이용한 거대자기저항(GMR)의 특성 연구
- ㆍ 저자명
- 김병우,이영석,Kim. Byeong-Woo,Lee. Young-Seok
- ㆍ 간행물명
- 한국자동차공학회논문집
- ㆍ 권/호정보
- 2008년|16권 5호|pp.113-118 (6 pages)
- ㆍ 발행정보
- 한국자동차공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We have developed an integrated giant magneto resistance using not only circuit but also integrating technique with semiconductor for automobile application. It has four elements used for giant magneto resistance sensor. Ni-Fe/Cu multi layers were prepared on a glass substrate by magnetron sputtering. The dependence of magneto resistance on the thickness of the Ni-Fe and Cu layers was investigated. The MR ratio showed a saturated a peak at Cu layer $10{AA}$, Ni-Fe layer $50{AA}$, where the MR ratio is about 8.7% at room temperature. By means of Ni-Fe multi film and specific integrating technique, these new giant magneto resistance sensor showed excellent resistance characteristics.