- 유리액를 이용한 레이저 선택 접합
- Laser bonding using liquid glass
- ㆍ 저자명
- 김주한,이제훈,김향태,Kim. Joo-Han,Lee. Jae-Hoon,Kim. Hyang-Tae
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2008년|11권 3호|pp.1-4 (4 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A selective laser micro bonding process using liquid glass (methylsilsesquioxane) was developed and the results are analysed. The liquid glass can be solidified with Nd:YAG laser irradiation and it can be applied for joining two glass substrates. A bonding thickness of a few micrometers can be achieved. The appropriate laser power density (or this process is around 40-60 $kW/cm^2$ and its bonding force is 1000-1200 $gf/mm^2$. This process can be applied for bonding micro devices such as micro bio-sensors or display products. Its advantages and limitations are presented and discussed.