- 이산화탄소 감지소자를 위한 마이크로볼로미터 구조 최적화 및 특성연구
- ㆍ 저자명
- 서호원,김태근,문성욱,Seo. Ho-Won,Kim. Tae-Geun,Moon. Sung
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2008년|17권 1호|pp.75-80 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this work, we optimized a microbolometer for application of a $CO_2$ detector by using MEMS technology. We fabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometer performance. We could fabricate more stable thermal isolation structure for the microbolometer through the results of ANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a $CO_2$ detector. The microbolometer shows a detectivity of $2.5{ imes}109$ cmHz$^{1/2}$/W at a chopper frequency of 8 Hz and a bias current of $6.25;{mu}A$ with a vacuum package of about $3.0{ imes}10.3$ torr. Therefore, we put to conclusion that the microbolometer optimized in this experiment could be useful for the application of a $CO_2$ detector.