- 화학기상공정을 이용한 나노질화알루미늄 분말 합성
- ㆍ 저자명
- 피재환,박종철,김유진,황광택,김수룡,Pee. Jae-Hwan,Park. Jong-Chul,Kim. Yoo-Jin,Hwang. Kwang-Taek,Kim. So-Ryong
- ㆍ 간행물명
- 한국분말야금학회지
- ㆍ 권/호정보
- 2008년|15권 6호|pp.496-502 (7 pages)
- ㆍ 발행정보
- 한국분말야금학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the $AlCl_{3}-NH_{3}-N_{2}$ system. Aluminum chloride ($AlCl_3$) as the starting material was gasified in the heating chamber of $300^{circ}C$. Aluminum chloride gas transported to the furnace in $NH_{3}-N_{2}$ atmosphere at the gas flow rate of 200-400ml/min. For samples synthesized between 700 and $1200^{circ}C$, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.