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Self-assembly of Fine Particles Applied to the Production of Antireflective Surfaces
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  • Self-assembly of Fine Particles Applied to the Production of Antireflective Surfaces
  • Self-assembly of Fine Particles Applied to the Production of Antireflective Surfaces
저자명
Kobayashi. Hayato,Moronuki. Nobuyuki,Kaneko. Arata
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 1호|pp.25-29 (5 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We introduce a new fabrication process for antireflective structured surfaces. A 4-inch silicon wafer was dipped in a suspension of 300-nm-diameter silica particles dispersed in a toluene solution. When the wafer was drawn out of the suspension, a hexagonally packed monolayer structure of particles self-assembled on almost the complete wafer surface. Due to the simple process, this could be applied to micro- and nano-patterning. The self-assembled silica particles worked as a mask for the subsequent reactive ion etching. An array of nanometer-sized pits could be fabricated since the regions that correspond to the small gaps between particles were selectively etched off. As etching progressed, the pits became deeper and combined with neighboring pits due to side-etching to produce an array of cone-like structures. We investigated the effect of etching conditions on antireflection properties, and the optimum shape was a nano-cone with height and spacing of 500 nm and 300 nm, respectively. This nano-structured surface was prepared on a $30;{ imes};10-mm$ area. The reflectivity of the surface was reduced 97% for wavelengths in the range 400-700 nm.