- 다결정 SiC 마이크로 공진기의 제작과 그 특성
- ㆍ 저자명
- 정귀상,이태원,Chung. Gwiy-Sang,Lee. Tae-Won
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2008년|17권 6호|pp.425-428 (4 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{sim}40{mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{sim}856.3kHz$. The $100{mu}m$ and $80{mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.