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Phase Change Characteristics of Sb-Based Phase Change Materials
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  • Phase Change Characteristics of Sb-Based Phase Change Materials
  • Phase Change Characteristics of Sb-Based Phase Change Materials
저자명
Park. Sung-Jin,Kim. In-Soo,Kim. Sang-Kyun,Choi. Se-Young
간행물명
한국재료학회지
권/호정보
2008년|18권 2호|pp.61-64 (4 pages)
발행정보
한국재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Electrical optical switching and structural transformation of $Ge_{15}Sb_{85}$, $Sb_{65}Se_{35}$ and N2.0 sccm doped $Sb_{83}Si_{17}$ were studied to investigate the phase change characteristics for PRAM application. Sb-based materials were deposited by a RF magnetron co-sputtering system and the phase change characteristics were analyzed using an X-ray diffractometer (XRD), a static tester and a four-point probe. Doping Ge, Se or Si atoms reinforced the amorphous stability of the Sb-based materials, which affected the switching characteristics. The crystallization temperature of the Sb-based materials increased as the concentration of the Ge, Se or Si increased. The minimum time of $Ge_{15}Sb_{85}$, $Sb_{65}Se_{35}$ and N2.0 sccm doped $Sb_{83}Si_{17}$ for crystallization was 120, 50 and 90 ns at 12 mW, respectively. $Sb_{65}Se_{35}$ was crystallized at $170^{circ}C$. In addition, the difference in the sheet resistances between amorphous and crystalline states was higher than $10^4{Omega}/{gamma}$.