- LTCC 를 이용한 SnO2 가스 센서
- ㆍ 저자명
- 조평석,강종윤,김선중,김진상,윤석진,이종흔,Cho. Pyeong-Seok,Kang. Chong-Yun,Kim. Sun-Jung,Kim. Jin-Sang,Yoon. Seok-Jin,Lee. Jong-Heun
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2008년|18권 2호|pp.69-72 (4 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at $800^{circ}C$ for 1 hour after lamination at $70^{circ}C$ under 3000 psi for 30 minutes. $SnO_2$ sol was prepared by a hydrothermal method at $200^{circ}C$ for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of $SnO_2$ sol were deposited onto a LTCC sensor element and this was heat treated at $600^{circ}C$ for 5 hours. The gas sensitivity ($S;=;R_a/R_g$) values of the $SnO_2$ sensor and 0.04 wt% Pd-added $SnO_2$ sensor were measured. The 0.04 wt% Pd-added $SnO_2$ sensor showed higher sensitivity (S = 8.1) compared to the $SnO_2$ sensor (S = 5.95) to 200 ppm $CH_3COCH_3$ at $400^{circ}C$.