Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated $1{ imes}104$ in eight groups and $1{ imes}30$ Si probe arrays and produced a smaller pitch ($15;{mu}m$) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM.