- 방전플라즈마 소결법을 이용한 ZnS-SiO2 복합재료의 제조와 기계적 특성
- ㆍ 저자명
- 신대훈,김길수,이영중,조훈,김영도,Shin. Dae-Hoon,Kim. Gil-Su,Lee. Young-Jung,Cho. Hoon,Kim. Young-Do
- ㆍ 간행물명
- 한국분말야금학회지
- ㆍ 권/호정보
- 2008년|15권 1호|pp.1-5 (5 pages)
- ㆍ 발행정보
- 한국분말야금학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
ZnS-$SiO_2$ composite is normally used for sputtering target. In recent years, high sputtering power for higher deposition rate often causes crack formation of the target. Therefore the target material is required that the sintered target material should have high crack resistance, excellent strength and a homogeneous microstructure with high sintered density. In this study, raw ZnS and ZnS-$SiO_2$ powders prepared by a 3-D mixer or high energy ball-milling were successfully densified by spark plasma sintering, the effective densification method of hard-to-sinter materials in a short time. After sintering, the fracture toughness was measured by the indentation fracture (IF) method. Due to the effect of crack deflection by the residual stress occurred by the second phase of fine $SiO_2$, the hardness and fracture toughness reached to 3.031 GPa and $1.014;MPa{cdot}m^{1/2}$, respectively.