The biocompatibility and the fatigue strength of Co-Cr-Mo alloy are excellent, so it is used well for the material of artificial joints. The head of artificial joint needs mirror surface for reduction of abrasive resistance. Mirror finishing of Co-Cr-Mo alloy with geometrically defined single crystal diamond cutting tools is handicapped by micro chipping of tool edge. In general, it is said that the micro chipping of diamond tool is caused by work hardening of Co-Cr-Mo alloy for the cut. In the present research, mirror finishing of Co-Cr-Mo alloy by applying ultrasonic elliptical vibration cutting was carried out. The experimental results show that the micro chipping of diamond tool was suppressed and the tool wear was remarkably reduced as compared with the ordinary diamond cutting without elliptical vibration motion. It was confirmed that the good mirror surface of maximum surface roughness of 25 nmP-V was obtained for the cutting length of about 14 m. It is expected that mirror finishing of Co-Cr-Mo alloy can be achieved by applying ultrasonic elliptical vibration cutting practically.