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Mass production of 3-D microstructures using projection microstereolithography
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  • Mass production of 3-D microstructures using projection microstereolithography
  • Mass production of 3-D microstructures using projection microstereolithography
저자명
Ha. Young-Myoung,Choi. Jae-Won,Lee. Seok-Hee
간행물명
Journal of mechanical science and technology
권/호정보
2008년|22권 3호|pp.514-521 (8 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Microstereolithography(MSL) technology is derived from the conventional stereolithography process and can meet the demands for fabricating complex 3-D microstructures with high resolution. This technology can be divided into scanning and projection methods, which have different levels of precision and fabrication speeds. Scanning MSL fabricates very fine 3-D microstructures by controlling the position of the laser spot on the resin surface. Projection MSL quickly fabricates one layer with one exposure using a mask. In this paper, we propose a projection MSL system with uniform illumination and image formation based on optical design for fabricating microstructure arrays. This system can realize mass production of 3-D microstructures in the meso-range, which falls between micro- and macro-ranges, with a resolution of a few microns. Microstructure arrays were fabricated to verify the performance of the proposed system.