In this study, we investigate the deformation behavior of F.C.C. single crystals containing micro- or submicron-sized voids by using three dimensional finite element methods. The locally homogeneous constitutive model for the rate-dependent crystal plasticity is integrated based on the backward Euler method and implemented into a finite element program (ABAQUS) by means of user-defined subroutine (UMAT). The unit cell analysis has been investigated to study the effect of stress triaxiality and crystallographic orientations on the growth and coalescence of voids in F.C.C. single crystals.