- 3차원 소자 집적을 위한 Cu-Cu 접합의 계면접착에너지에 미치는 후속 열처리의 영향
- ㆍ 저자명
- 장은정,현승민,이학주,박영배,Jang. Eun-Jung,Hyun. Seung-Min,Lee. Hak-Joo,Park. Young-Bae
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2008년|18권 4호|pp.204-210 (7 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$1.5;{mu}m$-thick copper films deposited on silicon wafers were successfully bonded at $415^{circ}C$/25 kN for 40 minutes in a thermo-compression bonding method that did not involve a pre-cleaning or pre-annealing process. The original copper bonding interface disappeared and showed a homogeneous microstructure with few voids at the original bonding interface. Quantitative interfacial adhesion energies were greater than $10.4;J/m^2$ as measured via a four-point bending test. Post-bonding annealing at a temperature that was less than $300^{circ}C$ had only a slight effect on the bonding energy, whereas an oxygen environment significantly deteriorated the bonding energy over $400^{circ}C$. This was most likely due to the fast growth of brittle interfacial oxides. Therefore, the annealing environment and temperature conditions greatly affect the interfacial bonding energy and reliability in Cu-Cu bonded wafer stacks.