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Nonlinear Optimal Control of an Input-Constrained and Enclosed Thermal Processing System
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  • Nonlinear Optimal Control of an Input-Constrained and Enclosed Thermal Processing System
  • Nonlinear Optimal Control of an Input-Constrained and Enclosed Thermal Processing System
저자명
Gwak. Kwan-Woong,Masada. Glenn Y.
간행물명
International Journal of Control, Automation and Systems
권/호정보
2008년|6권 2호|pp.160-170 (11 pages)
발행정보
제어로봇시스템학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Temperature control of an enclosed thermal system which has many applications including Rapid Thermal Processing (RTP) of semiconductor wafers showed an input-constraint violation for nonlinear controllers due to inherent strong coupling between the elements [1]. In this paper, a constrained nonlinear optimal control design is developed, which accommodates input constraints using the linear algebraic equivalence of the nonlinear controllers, for the temperature control of an enclosed thermal process. First, it will be shown that design of nonlinear controllers is equivalent to solving a set of linear algebraic equations-the linear algebraic equivalence of nonlinear controllers (LAENC). Then an input-constrained nonlinear optimal controller is designed based on that LAENC using the constrained linear least squares method. Through numerical simulations, it is demonstrated that the proposed controller achieves the equivalent performances to the classical nonlinear controllers with less total energy consumption. Moreover, it generates the practical control solution, in other words, control solutions do not violate the input-constraints.