Inner diameter of bearing race is automatically measured by complete inspection system after grinding process. Contact type three points supporting method is widely applied to automatic inner diameter measurement because of its excellent stability. However, the geometric consideration regarding three points supporting method is not sufficient. In this study, the error equation from geometric error analysis of three points supporting method is found. The effect of factors in the error equation is also investigated. The error equation is linear for difference of diameter in sample and master on range of tolerance. An error becomes more and more larger, when the distance of two supporting balls or the diameter of supporting ball are increased. In the result, some considerations are proposed for measurement of inner diameter by the three points supporting method.